@InProceedings{SantosTrCaBoRaC:2008:MeTrSt,
author = "Santos, L. V. and Trava-Airoldi, Vladimir Jesus and Capote, Gil
and Bonetti, L. F. and Radi, P. A. and C. , Statuti R. P. C.",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Clorovale Diamantes
Ind{\'u}stria e Com{\'e}rcio Ltda} and {Instituto
Tecnol{\'o}gico de Aeron{\'a}utica} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas
Espaciais (INPE)}",
title = "Mechanical and tribological studies of DLC films on stainless
steel substrates",
booktitle = "Anais...",
year = "2008",
organization = "Encontro SBPMat, 7.",
keywords = "Diamond-like carbon, stainless steel, PECVD, tribological
properties.",
abstract = "Surface and bulk properties of diamond-like carbon (DLC) films
prepared by using different techniques and under different
conditions have been of great concern. The main focus is to reach
low total stress, high hardness, very high adherence with the
substrate, and low friction coefficient, including the deposition
in large area at high growth rate [1-2]. In this work, hard and
adherent DLC films were deposited by using a low cost pulsed-DC
discharge technique in methane atmosphere. Studies have been
carried out in order to match the best set of parameters for
deposition of hard and adherent DLC coatings on stainless steel
substrates. A thin amorphous silicon interlayer was used to reduce
DLC films total stress and to improve the films adhesion on the
substrates, using silane as the precursor gas. A conventional
profilometry technique was used to measure the total stress and
thicknesses. The film microstructure was studied by means of Raman
scattering spectroscopy. Nano-indentation was used to measure the
hardness on DLC films. The friction coefficient measurements and
the scratching tests were done by using a tribometer. Results of
the deposition rates, total stresses, hardness degrees, structural
properties, friction coefficients, and adherence tests as a
function of the pulsed-DC voltage will be presented.",
conference-location = "Guaruj{\'a}, SP",
conference-year = "28 set. - 02 out.",
language = "en",
urlaccessdate = "09 maio 2024"
}